Performance Estimation of a Real-time Aberration Correction System for Scanning Transmission Electron Microscopes
نویسندگان
چکیده
The resolution of a scanning transmission electron microscope remains 100 times worse than its theoretical limit owing to the spherical aberration of objective lens. Ikuta proposed a system to generate an aberration-free amplitude image and phase image using multiple small detectors with real-time signal processing. This study shows the performance optimization results of its signal processing procedure, and estimates the overall performance of Ikuta’s aberration correction system.
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